• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    A capacitive sensing device comprising: a capacitive sensor (1A) comprising - a ribbon of a dielectric material (2), - a pair (3) of electrodes formed on a first face of said ribbon and comprising a first electrode (4) and a second electrode (5) in the form of combs whose branches are arranged alternately between each other; and - a third layer-shaped electrode (7) formed on the other side of said ribbon; and further comprising a confinement electrode (1B) disposed at least partially opposite and remote from said pair of electrodes, said confining electrode being electrically connected to said third electrode. Measuring devices including this capacitive sensing device.
    公开号:FR3051553A1
    申请号:FR1654349
    申请日:2016-05-17
    公开日:2017-11-24
    发明作者:Pierre Jean-Yves Thibault
    申请人:Universite Grenoble Alpes；
    IPC主号:
    专利说明:

    Capacitive sensing device and measuring device including
    The present invention relates to the field of capacitive detection devices and their applications to measuring devices, in particular displacement measurements, fluid level measurements, thickness measurements, in particular fluid films, and presence detection.
    It is known to produce capacitive sensors which comprise, on one side of a ribbon made of a dielectric material, two comb-shaped electrodes whose branches are arranged alternately between each other or interdigitated and, on the other side, a ground electrode. It is known that the presence of the ground electrode makes it possible, by a three-wire measurement, to increase the sensitivity of the device, and to protect it from extraneous external effects. In general, it is considered that the capacitance between the interdigital electrodes of such a device is the sum of a dielectric contribution inside the ribbon and another dielectric contribution on the outer part of the plane of the electrodes, which comes vacuum or fluid.
    Furthermore, the international patent application published under No. WO2009 / 122061 discloses a capacitive detector whose characteristics make it possible to increase the sensitivity of such capacitive detectors.
    According to one embodiment, there is provided a capacitive sensing device which comprises a capacitive detector and a confinement electrode.
    Capacitive sensing comprises a ribbon of dielectric material; at least one pair of electrodes comprising a first comb-shaped electrode formed on a first face of said ribbon and comprising parallel transverse branches interconnected by a longitudinal connecting leg and a second comb-shaped electrode formed on said first face said ribbon and comprising parallel transverse branches interconnected by a longitudinal connecting leg, the transverse branches of said first and second electrodes being arranged alternately between each other in at least one determined period (λ); and at least one third layer-shaped electrode formed on the other side of said ribbon, said third electrode and said pair of electrodes covering opposite areas of said ribbon. The confinement electrode is disposed at least partly opposite and at a distance from said pair of electrodes, this confinement electrode being electrically connected to said third electrode.
    The capacitive detector and the confinement electrode may be flat and arranged in parallel.
    The capacitive detector and the confinement electrode may extend in concentric circumferences. The thickness (e) of the dielectric ribbon may be less than or equal to said determined period (λ) divided by four times PI (ie: λ / 4π> ο).
    The ratio, resulting from the numerator division of the capacitance (C) between two adjacent branches of said first and second electrodes in the presence of at least one selected medium of dielectric permittivity (Sm), interposed between the capacitive detector and the electrode of confinement, and denominator by the dielectric permittivity (sm) of the medium multiplied by the capacitance (Co) between the two adjacent branches of the first and second electrodes in the presence of the vacuum, is greater than or equal to one (ie: C / sm Co> l).
    The distance between the confinement electrode and the capacitive detector may be between one twentieth and twenty times said determined period (λ).
    There is also provided a device for measuring the level of a fluid or the thickness of a fluid film, which comprises a detection device as defined above, in which at least a part of the liquid is present between the capacitive detector and the confinement electrode; and means for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector.
    It is also proposed a device for measuring the displacement of a first piece relative to a second piece, which comprises a detection device as defined above, in which the capacitive detector is integral with one of the pieces and the confinement electrode is integral with the other piece; and means for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector.
    Said parts may be able to move in the direction that removes and / or brings the capacitive detector and the confinement electrode closer together.
    Said parts may be able to move in the direction that increases or reduces the overlap of the confinement electrode relative to the capacitive detector.
    It is also proposed a device for measuring the displacement of a first part relative to a second part, which comprises a detection device as defined above, in which the capacitive detector and the confinement electrode are integral with the one of the parts, the other part comprising a dielectric element secured to the other part and engaged between the capacitive detector and the confinement electrode; and means for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector.
    A detection device and measuring devices will now be described by way of non-limiting examples, illustrated by the appended drawing in which: - Figure 1 shows, in perspective, a detection device, including a capacitive detector; FIG. 2 represents a side view of the capacitive detector of FIG. 1; FIG. 3 represents a longitudinal section of the capacitive detector of FIG. 1; FIG. 4 represents an electronic diagram of an electronic circuit to which the detection device of FIG. 1 is connected; and FIGS. 5 to 9 show measuring devices including the aforementioned detecting device of FIG. 1.
    FIGS. 1 to 3 show a capacitive detection device 1 which comprises a capacitive detector 1A and a confinement electrode IB.
    The capacitive detector 1A comprises a longitudinal ribbon 2 made of a dielectric material, flexible or rigid, a pair 3 of electrodes comprising a first electrode 4 and a second electrode 5 formed on a face 6 of the dielectric ribbon 2, and a third electrode 7 formed on the other side 8 of the dielectric ribbon 2.
    The first electrode 4 is comb-shaped and comprises parallel transverse branches 9, regularly spaced and interconnected by a longitudinal connecting leg 10.
    The second electrode 5 is in the form of a comb and comprises parallel transverse branches 11, regularly spaced and interconnected by a longitudinal connecting leg 12.
    The transverse branches 9 and 11 of the first and second electrodes 4 and 5 are arranged alternately between each other, have equal widths and equal lengths and are spaced at equal distances from each other, the transverse branches 9 extending in direction of the longitudinal connecting leg 12 and the parallel transverse branches 11 extending towards the longitudinal connecting leg 10. Such an arrangement is called an interdigitated structure.
    Thus, the transverse branches 9 and 11 are arranged in a determined period λ which comprises the addition of a width of the branches 9 of the electrode 4, a width of the branches 11 of the electrode 5 and two spaces 13 between two adjacent branches 9 and 11.
    The third electrode 7 is in the form of a layer which advantageously covers an area of the face 8 of the dielectric ribbon 2 opposite the zone of the face 6 of the dielectric ribbon 2 covered by the pair 3 of interdigital electrodes 4 and 5.
    For example, the dielectric ribbon 2 may be of a plastic material such as a polyimide such as Kapton, or such as polytetrafluoroethylene (Teflon) and the electrodes 4, 5 and 7 may be formed by layers of a metal material such as only copper or gold. The opposite faces of the capacitive detector 1A may be covered with the thin protective layers covering the pair 3 of interdigital electrodes 4 and 5 and the electrode 7, these thin protective layers being for example of a dielectric material. The confinement electrode IB is formed by a plate made of an electrically conductive material, formed for example of a copper or gold metal sheet. The confinement electrode IB is situated on the side of or opposite the face 6 of the ribbon 2 bearing the pair 3 of interdigital electrodes 4 and 5 and is arranged parallel and at a distance from the capacitive detector 1A, so that there is a space of constant thickness between the capacitive detector LA and the confinement electrode IB.
    The dielectric ribbon 2 may be, for example, a plastic material such as polyimide such as Kapton, or such as polytetrafluoroethylene (Teflon).
    Advantageously, the thickness e of the dielectric ribbon 2 is less than or equal to said determined period λ divided by four times PI, ie the formula (1): λ / 4π> e.
    The ratio resulting from the numerator division of the capacitance entre between two adjacent branches 9 and 11 of the first and second electrodes 4 and 5 in the presence of at least one selected medium of dielectric permittivity Sm, interposed between the capacitive detector IA and the confinement electrode IB, and denominator by the dielectric permittivity (sm) of the medium multiplied by the capacitance (Co) between the two adjacent branches 9 and 11 of the first and second electrodes 4 and 5 in the presence of the vacuum is greater than or equal to or formula (2): C / Sm Co> 1.
    The distance between the confinement electrode IB and the capacitive detector IA can advantageously be between one twentieth and twenty times said determined period λ.
    As illustrated in FIG. 4, the capacitive detection device 1 is connected to an electronic measuring circuit 14. The first and second interdigital electrodes 4 and 5 are respectively connected to inputs 15 and 16 of the electronic measurement circuit 14 by wires electrical 15a and 16a. The third electrode 7 and the confinement electrode IB are connected to the same input 17 of the electronic measurement circuit 14 by electrical wires 17a and 17b, so that the third electrode 7 and the confinement electrode IB are interconnected. .
    The electronic measuring circuit 14 is adapted so that the third electrode 7 and the confinement electrode IB, via the input 17, are at a reference potential. The electronic measuring circuit 14 comprises a measuring device connected to the first and second interdigital electrodes 4 and 5, via the inputs 15 and 16, and capable of delivering on an output 18 a signal relating to the measurement of the mutual capacity between the first and second interdigital electrodes 4 and 5.
    For example, since the electrode 5 is referenced with respect to the third electrode 7 and the confinement electrode IB connected together, the measuring device can thus be a so-called three-terminal device, and can involve a measurement by a bridge. said Blumlein.
    The presence of the confinement electrode IB influences the magnetic field lines in the environment of the interdigital electrode pair 4 and 5 of the capacitive detector 1A, by inducing a distribution of the field lines between the electrodes 4 and 5 of the detector. capacitive 1A and also between electrodes 4 and 5 and the confinement electrode IB, so that the measurement of the mutual capacitance between the interdigital electrodes 4 and 5 depends on or varies as a function of the distance between the capacitive detector 1A and the confinement electrode IB, and / or the relative overlap between the capacitive detector LA and the confinement electrode IB and / or the dielectric medium established between the capacitive detector LA and the confinement electrode IB.
    The capacitive sensing device 1 can be applied in many fields.
    According to an application illustrated in FIG. 5, the capacitive detection device 1 can be used to measure the level of a liquid in a reservoir or in a pipe.
    For this, the capacitive detector 1A and the confinement electrode are placed substantially vertically, the branches 9 and 11 of the electrodes 4 and 5 being horizontal, so that a blade L of liquid extends between them. Advantageously, the confinement electrode IB remotely covers the entire surface of the capacitive detector 1A.
    The dielectric medium established between the capacitive detector LA and the confinement electrode IB is defined by a part of the liquid, in the form of a liquid blade L, which covers a lower portion of the pair of interdigital electrodes 4 and 5. the capacitive detector LA and the confinement electrode IB and above the blade L by a gas.
    In formula (2) above, the dielectric permittivity Sm of the medium chosen is that of the liquid.
    The number of horizontal branches 9 and 11 of the interdigital electrodes 4 and 5, covered by the plate L of liquid, depends on the level of the free surface Ls of this plate L of the liquid and therefore on the level of the free surface of the liquid in the reservoir. or driving.
    Thus, the measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is a function of the length of the lower portion of the pair 3 of interdigital electrodes 4 and 5 of the capacitive detector 1A, covered by the blade L of liquid, and therefore, substantially the number of horizontal branches 9 and 11 of the interdigital electrodes 4 and 5, covered by the blade L of liquid.
    This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the situation and displacement values of the level of the free surface Ls of the liquid slide L and thus the situation of the level of the liquid in the reservoir. . Substantially, the variation of the measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is proportional to the immersed length of the capacitive detector 1A in the liquid. By calculation, the electronic measuring circuit 14 may also be able to deliver the speed of the displacements of the free surface Ls of the liquid blade L.
    According to an implementation example, the confinement electrode IB can be suspended in the reservoir while being stretched. According to one variant, the capacitive detector 1A may be suspended in the tank or the pipe may be stretched. According to another option, the capacitive sensor 1A can be attached to an inner wall of the tank or pipe. According to another option, the capacitive sensor 1A may be attached to an outer wall of the tank or pipe provided that this wall is not metallic.
    According to a variant of use, the measuring device 1 can also be applied to the determination of the level of any material in powder, particles or grains behaving in a manner equivalent to a liquid.
    According to an application variant, the capacitive detection device 1 can be used to measure the thickness of a film made of a dielectric material, for example a film of liquid extending between the capacitive detector 1A and the confinement electrode IB.
    The measured value of the mutual capacity between the first and second interdigitated electrodes 4 and 5 is a function of the thickness of the film. This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the value of the thickness of the film.
    According to an application variant, the capacitive detection device 1 can be implemented to detect the presence of a mist, when the measured value of the mutual capacitance between the first and second interdigital electrodes 4 and 5 passes a predetermined threshold, and / or the density of such a fog, the measured value of the mutual capacity between the first and second interdigitated electrodes 4 and 5 being a function of this density.
    According to another application illustrated in FIG. 6, the capacitive detector 1A and the confinement electrode IB, arranged in parallel, are respectively integral with moving parts 101 and 102 in the direction of the approaching and / or the removal of the capacitive detector 1A. and the confinement electrode IB, the dielectric medium between the capacitive detector LA and the confinement electrode IB being deformable, for example a gas. Advantageously, the confinement electrode IB remotely covers the entire surface of the capacitive detector 1A.
    In the aforementioned formula (2), the dielectric permittivity Sm of the medium chosen is that of the dielectric medium established between the capacitive detector IA and the confinement electrode IB.
    The measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is a function of the distance between the capacitive detector 1A and the confinement electrode IB. This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the position and displacement values of the parts 101 and 102 relative to each other. By calculation, the electronic measuring circuit 14 can also be adapted to deliver the speed of movements of the parts 101 and 102 relative to each other.
    According to another application illustrated in FIG. 7, the capacitive detector 1A and the confinement electrode IB, arranged in parallel and in opposition, are integral with a part 103. Advantageously, the confinement electrode IB covers at distance the entire surface of the capacitive sensor lA.
    A part 104 is provided with a dielectric plate 105 which is partially engaged between the capacitive detector LA and the confinement electrode IB and which is arranged parallel to and at a distance from the latter.
    The parts are movable relative to each other in the longitudinal direction of the capacitive sensor 1A. The dielectric blade 105 has an end transverse edge 106 parallel to the branches 8 and 9 of the interdigital electrodes 4 and 5. Advantageously, the dielectric blade 105 remotely covers the entire surface of the capacitive detector 1A.
    In this application, there is a situation substantially equivalent to the situation described with reference to Figure 5, the dielectric blade 105 playing a role substantially equivalent to that of the blade L of liquid.
    Thus, the measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is a function of the length of the portion of the pair 3 of interdigital electrodes 4 and 5 of the capacitive detector 1A, covered by the dielectric plate 105, and therefore, substantially the number of horizontal branches 9 and 11 of the interdigital electrodes 4 and 5, covered by the dielectric plate 105.
    This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the longitudinal position of the dielectric plate 105 with respect to the capacitive detector 1A and thus the longitudinal position and displacement values of the parts 103 and 104. one compared to the other. Substantially, the variation of the measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is proportional to the length of the dielectric plate 105 engaged between the capacitive detector 1A and the confinement electrode IB. By calculation, the electronic measuring circuit 14 can also be adapted to deliver the speed of the movements of the parts 103 and 104 relative to each other.
    According to another application illustrated in FIG. 8, the capacitive detector 1A and the confinement electrode IB, arranged in parallel and in facing relation, are respectively integral with longitudinally movable parts 107 and 108 relative to each other. other. The confinement electrode IB has an end edge 109 parallel to the branches 9 and 11 of the interdigital electrodes 4 and 5 and is arranged to remotely cover an end portion of the capacitive detector 1A.
    The measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is a function of the length of the portion of the pair 3 of interdigital electrodes 4 and 5 of the capacitive detector 1A, covered remotely by the confinement electrode. IB, and therefore the longitudinal position of the parts 107 and 108 relative to each other.
    This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the longitudinal position of the confinement electrode IB with respect to the capacitive detector 1A and thus the longitudinal position and displacement values of the pieces 107 and 108. one with respect to the other. Substantially, the variation of the measured value of the mutual capacitance between the first and second interdigitated electrodes 4 and 5 is proportional to the value of the overlap between the capacitive detector 1A and the confinement electrode IB. By calculation, the electronic measuring circuit 14 can also be adapted to deliver the speed of the movements of the parts 107 and 108 relative to each other.
    According to another application illustrated in Figure 9, the parts 110 and 111 are rotatable relative to each other along an axis of rotation. In this case, the capacitive detector 1A and the confinement electrode IB are respectively integral with the parts 110 and 111 and are formed annularly along coaxial circumferences to the parts 110 and 111, the capacitive detector 1A and the confinement electrode IB being radially in vis-à-vis.
    The branches 9 and 11 of the interdigital electrodes extend axially. The confinement electrode IB has an end axial edge 112 parallel to the branches 9 and 11 of the interdigital electrodes 9 and 11 and is arranged to remotely cover an end portion of the capacitive detector 1A.
    In an alternative embodiment, the capacitive detector 1A and the confinement electrode IB could be arranged axially in facing relation, the branches 9 and 11 of the interdigital electrodes then extending radially and the edge 112 then extending radially. .
    The measured value of the mutual capacitance between the first and second interdigital electrodes 4 and 5 is a function of the length of the arc of the portion of the pair 3 of interdigital electrodes 4 and 5 of the capacitive detector 1A, covered remotely by the arc of the confinement electrode IB, and therefore the angular position of the parts 107 and 108 relative to each other.
    This function being programmed, the electronic measuring circuit 14 is able to deliver at its output 18 the angular position of the confinement electrode IB with respect to the capacitive detector 1A and thus the angular position and angular displacement values of the pieces 107 and 108 relative to each other. By calculation, the electronic measuring circuit 14 can also be adapted to deliver the speed of rotation of the parts 107 and 108 relative to each other.
    In the applications which have just been described, the confinement electrode IB may be fixed on the part which carries it by means of a sheet 113 made of a dielectric material, for example a plastic material such as a polyimide as Kapton, or as a polytetrafluoroethylene (Teflon), to prevent the material of the part that carries the confinement electrode IB prevents or influences the measurements made. The confinement electrode IB may be constituted by a metal part of the part, provided, in particular in the applications of FIGS. 8 and 9, that the edges 109 and 112 which determine an end of the surface of the confinement electrode IB, allowing the measurements, opposite the capacitive detector 1A, and provided that the surface of the part, which follows this edge, is further away from the capacitive detector 1A.
    权利要求:
    Claims (10)
    [1" id="c-fr-0001]
    A capacitive sensing device comprising: a capacitive sensor (1A) comprising - a ribbon of a dielectric material (2), - at least one pair (3) of electrodes comprising a first comb-shaped electrode (4) formed on a first face of said ribbon and comprising parallel transverse branches (9) interconnected by a longitudinal connecting leg (10) and a second comb-shaped electrode (5) formed on said first face of said ribbon and comprising parallel transverse branches (11) interconnected by a longitudinal connecting leg (12), the transverse branches of said first and second electrodes being arranged alternately between each other in at least one predetermined period (λ), and at least one third electrode (7). ) in the form of a layer formed on the other side of said ribbon, this third electrode (7) and said pair of electrodes covering opposite zones s of said ribbon; and further comprising a confinement electrode (IB) disposed at least partially opposite and at a distance from said pair of electrodes, said confining electrode being electrically connected to said third electrode.
    [2" id="c-fr-0002]
    2. Device according to claim 1, wherein the capacitive detector and the confinement electrode are flat and arranged in parallel.
    [3" id="c-fr-0003]
    3. Device according to claim 1, wherein the capacitive detector and the confinement electrode extend in concentric circumferences.
    [4" id="c-fr-0004]
    4. Device according to any one of the preceding claims, wherein the thickness (e) of the dielectric ribbon (2) is less than or equal to said determined period (λ) divided by four times PI, ie: λ / 4π> ο ; and wherein the ratio, resulting from the numerator division of the capacitance (C) between two adjacent branches (9, 11) of said first and second electrodes in the presence of at least one selected medium of dielectric permittivity (sm), interposed between the capacitive detector (1A) and the confinement electrode (IB), and denominator by the dielectric permittivity (sm) of the medium multiplied by the capacitance (Co) between the two adjacent branches of the first and second electrodes in the presence of vacuum, is greater than or equal to one, that is: C / sm-Co> l.
    [5" id="c-fr-0005]
    5. Device according to any one of the preceding claims, wherein the distance between the confinement electrode (IB) and the capacitive detector (lA) is between one twentieth and twenty times said determined period (λ).
    [6" id="c-fr-0006]
    6. A device for measuring a fluid level or a thickness of a fluid film comprising: a detection device (1) according to one of claims 1 to 5, wherein at least a portion of the liquid is present between the capacitive detector (1A) and the confinement electrode (IB); and means (14) for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector (1A).
    [7" id="c-fr-0007]
    7. Device for measuring the displacement of a first part relative to a second part, comprising: a detection device (1) according to one of claims 1 to 5, wherein the capacitive detector (1A) is integral with the one of the pieces and the confinement electrode (IB) is integral with the other piece; and means (14) for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector (1A).
    [8" id="c-fr-0008]
    8. Device according to claim 7, wherein said parts are able to move in the direction which removes and / or brings the capacitive detector and the confinement electrode closer together.
    [9" id="c-fr-0009]
    9. Device according to claim 7, wherein said parts are able to move in the direction which increases or reduces the overlap of the confinement electrode (IB) relative to the capacitive detector (IA).
    [10" id="c-fr-0010]
    A device for measuring displacement of a first part relative to a second part, comprising: a detection device (1) according to one of claims 1 to 5, wherein the capacitive detector (1A) and the electrode containment (IB) are integral with one of the parts, the other part comprising a dielectric element integral with the other part and engaged between the capacitive detector (lA) and the confinement electrode (lA); and means (14) for measuring the capacitance between said first and second electrodes of the electrode pair of the capacitive detector (1A).
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    同族专利:
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    US20170336242A1|2017-11-23|
    FR3051553B1|2018-06-15|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
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    US11133799B2|2019-11-20|2021-09-28|Ford Global Technologies, Llc|Capacitive proximity sensor assembly having multiple sensing configurations|
    法律状态:
    2017-05-24| PLFP| Fee payment|Year of fee payment: 2 |
    2017-11-24| PLSC| Publication of the preliminary search report|Effective date: 20171124 |
    2019-09-16| PLFP| Fee payment|Year of fee payment: 4 |
    2020-03-27| CL| Concession to grant licences|Name of requester: SATT LINKSIUM GRENOBLE ALPES, FR Effective date: 20200220 |
    2021-02-12| ST| Notification of lapse|Effective date: 20210105 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1654349|2016-05-17|
    FR1654349A|FR3051553B1|2016-05-17|2016-05-17|CAPACITIVE DETECTION DEVICE AND MEASURING DEVICE INCLUDING THE SAME|FR1654349A| FR3051553B1|2016-05-17|2016-05-17|CAPACITIVE DETECTION DEVICE AND MEASURING DEVICE INCLUDING THE SAME|
    EP17171076.7A| EP3246667B1|2016-05-17|2017-05-15|Capacitive detection device and measurement device including same|
    US15/597,017| US10697818B2|2016-05-17|2017-05-16|Capacitive detection device and measuring device including same|
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